Friday, April 16, 2004

Vacuum Technology

Capacities are available up to many thousands of cu ft per minute, operating in the pressure range of 10-3 to below 10-11 torr. The full speed of the pump, which only pumps chemically reactive gases, is developed at pressures below 10-5 torr. In this type of pump, titanium is sublimed onto the pump walls from either a resistance or an electron-beam heated source. Active gases are pumped

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